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May 16-17, 2019 | Prague, Czech Republic
2
nd
International Conference on
22
nd
International Conference on
Nanomaterials and Nanotechnology
Advanced Nanoscience and Nanotechnology
Joint Event
&
Journal of Materials Science and Nanotechnology | Volume 3
Mater Sci Nanotechnol, Volume 3
Development of ozone gas senors based on delafossite thin films
João Afonso
Luxembourg Institute of Science and Technology, Luxembourg
O
zone gas sensors development is a growing need in
modern days, due to it’s increase use in several industry
areas. A major problem is it’s production in office enviroment
by lab equipments and laser printers. Ozone exposure can
cause several long run cardiopulmunary problems. With
this in mind there is the urge to develop efficient, cheap and
office compatible sensors. Delafossite is an interesting p-type
material that has shown it’s responsivity to ozone. With
this in mind we will deeply explore delafossite properties
and it’s responsivity to ozone as well as it’s integration
into devices and understand the udnerlaying relation. Our
delafossite films are deposited by Metal Organic Chemical
Vapor Deposition (MOCVD) and undergo annealing steps
in order to control its electrical properties. We have been
developing a state of the art etching process for delafossite
with interesting results, leading into the patterning and
We have been developing a state of the art etching
process for delafossite with interesting results, leading
into the patterning and the integration of the first devices.
e
:
joao.afonso@list.lu