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allied
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Materials-Metals 2017
Notes:
Page 42
November 16-17, 2017 Paris, France
13
th
Annual Conference on
Materials Science, Metal and Manufacturing
Journal of Materials Science and Nanotechnology
Volume 1 Issue 2
Fabrication of high quality Ag thin film using
ZnO buffer layer
Bo Gwang Jung
and
Se Young Jeong
Pusan National University, Korea
S
ilver (Ag) is a metal with the highest conductivity. It is
the only metal with lower resistance (1.63 μΩ cm) than
copper (1.72 μΩ cm). However, when it is used as a thin
film, the scattering of electrons at the grain boundary is
combined with the effect of surface scattering, so that the
decrease of conductivity and the oxidation problem become
more serious and the signal of reflectance and plasmonic
phenomenon in the visible light region is lost. In this study,
we tried to compensate many disadvantages of silver thin film
by growing the silver thin film close to the single crystal level.
A modified sputtering system was used instead of MBE or
ALD to fabricate samples with a large area, and ZnO grown
on Al
2
O
3
substrate with orientation (001) was grown on
the Ag thin film. The crystallinity of the fabricated samples
was investigated using XRD, SEM, EBSD, AFM and sheet
resistance. The fabricated silver thin films showed a high
level of (111) surface orientation and surface roughness of
RMS 1 ~ 1.5nm and a sharp decrease in grain boundaries. In
addition, by controlling the deposition time of the silver thin
film, it is possible to manufacture a silver thin film having a
thickness of several tens of nanometers to several hundreds
of nanometers, so that it can be applied for various purposes.
Figure:
Experimental schematic diagram
Biography
Bo Gwang Jung graduated from Pusan National University in 2017 with a
major in Optical Mechatronics. After that, I am a master student of the major
in the Cogno-Mechatronics as a student of Professor Se – young Jeong in
Pusan National University. My research area is on the physical properties and
application of metal (copper and silver) thin films.
wjdqhrhkd@naver.comBo Gwang Jung et al., Mater Sci Nanotechnol 2017, 1:2