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Page 31
Journal of Biotechnology and Phytochemistry
Volume 1, Issue 2
Notes:
Plasma Chemistry 2017
November 13-14, 2017 Paris, France
5th International Conference on
PLASMA CHEMISTRY AND
PLASMA PROCESSING
V A Riaby, J Biot Phyt 2017
Elevating the precision of RF plasma probe
diagnostics by elimination of bare probe
protective shields’ influence
This work deals with probe diagnostics errors for
radio-frequency (RF) plasma using Langmuir probes
with bare protective shields that led to the proposal of
a method of their correction. The parameters of xenon
inductive plasma were measured by two differently
located Langmuir probes having reference probes and
bare protective shields. Accurate probe diagnostics with
an advanced probe station VGPS-12 featuring precise
registration of plasma electron energy distribution
functions (EEDFs) and traditional plasma parameters,
enabled effective quantitative evaluations of EEDF
deviations from the Maxwell function. These deviations
were considered as EEDF distortions that turned out
to linearly depend on the length of the probe protective
shield no. 1. Its EEDF distortions reached minimal
level at the special point that was common for both
probes where the shield length no. 1 became zero
while the shield no. 2 remained rather long. In this point
measurement differences for both probes weremaximal.
Their comparison identified the principled relationship
between measurement errors and EEDF distortions,
which enabled corrections of all measured plasma
parameters. These actions have composed a method of
RF plasma probe diagnostics without influence of bare
probe protective shields. Its physical analysis showed
that the nature of thus studied measurement errors was
a short-circuited double-probe phenomenon in the bare
protective shields caused by longitudinal variation of
plasma space potential.
Biography
V A Riaby has completed his studies at Kalinin Suvorov Military College from
1949-1956 and graduated with golden medal. In 1962, he graduated from the
Engine department of flying apparatus, Moscow Aviation Institute (MAI). He
received scientific degree candidate of technical sciences and scientific rank of
senior researcher in 1972 and 1981 respectively from the same MAI department.
His research interests and professional activities are concentrated in the fields of
electrical propulsion, plasma physics/diagnostics and plasma technology. Currently,
he is working as leading scientist at the research institute of applied mechanics and
electrodynamics of the moscow aviation institute.
V A Riaby
University in Moscow, Russia