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May 16-17, 2019 | Prague, Czech Republic
2
nd
International Conference on
22
nd
International Conference on
Nanomaterials and Nanotechnology
Advanced Nanoscience and Nanotechnology
Joint Event
&
Journal of Materials Science and Nanotechnology | Volume 3
Mater Sci Nanotechnol, Volume 3
Silicon nanofabrication and carbon-based nanotechnology
Kaitlyn Parsons
and
Joseph W Lyding
University of Illinois, USA
S
canning tunneling microscopy (STM) offers the unique
opportunity to push the limits of nanotechnology by
means of atomic precision control of individual atoms.
Hydrogen resist lithography is an example of how the Lyding
group at the University of Illinois at Urbana-Champaign
has demonstrated the potential to push the atomic limit
in silicon. In addition to opening new directions in silicon-
based molecular nano technology, this work also led to the
fortuitous result that deuterium can be used to dramatically
retard hot-electron degradation effects in today’s CMOS
technology. Continued CMOS scaling has necessitated the
search for new materials that address the limits of silicon
technology. Carbon-based nanotechnology, in the form of
carbon nanotubes (CNTs), graphene and atomically precise
graphene nanoribbons (GNRs), has emerged as a promising
area for post-silicon device applications. One of the major
challenges in studying these carbon structures is a clean
transfer method onto semiconductor substrates. The Lyding
group developed the unprecedented clean deposition
method of nonvolatile nanostructures onto clean surfaces
known as dry contact transfer (DCT). In this method,
nanomaterials are applied to an applicator and then carefully
stamped onto the substrate in ultra-high vacuum (UHV). The
success of this DCT method along with STM and scanning
tunneling spectroscopy (STS) has revealed characteristics of
nanostructures including orientation-dependent effects in
single-walled carbon nanotubes, zigzag edge states in the
electronic structure of graphene and atomic precision control
of atomically precise GNRs. Nanometallization using STM
addresses how these carbon nanostructures can then be
fabricated in devices. This presentation provides compelling
evidence of atomic precision using carbon nanostructures
and offers future direction in order to continue advancing the
limits of nanotechnology.
Speaker Biography
Kaitlyn Parsons is a senior PhD candidate in electrical and computer
engineering at the University of Illinois at Urbana-Champaign conducting
research in Professor JosephW Lyding’s group. Her research is on scanning
tunneling microscopy and spectroscopy of wet chemically synthesized
graphene nanoribbons. She has presented at numerous conferences on
her research including at the American Physical Society conference in
Boston, Massachusetts and at the Materials Research Society conference
in Phoenix, Arizona. She holds a Master of Science in electrical and
computer engineering from the University of Illinois at Urbana-Champaign
and two Bachelor of Science degrees in engineering physics and applied
mathematics from the University of Colorado, Boulder.
e:
kap2@illinois.edu