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Journal of Materials Science and Nanotechnology | Volume 2
July 23-25, 2018 | Moscow, Russia
Materials Science and Engineering
International Conference on
X-ray Fluorescence analysis at total reflection in conditions of planar waveguide resonators application
V K Egorov and E V Egorov
Institute of Microelectronics Technology and High Purity Materials RAS, Russia
One of the most task of material diagnostics is the element
analysisof thinfluorescenceanalysisexecuted inconditions
of total external reflection of X-ray exciting beamon the studied
surface-TXRF analytical method is the best experimental
technique for the task solution.. TXRF is characterized by very
attractive detection limits owing to low magnitude of the
background deposit and exemption from matrix effect. X-ray
fluorescence yield intensity in the method is proportional
to element concentration in the excited layer. It’s thickness
is nearly 3-5 nm. In the result, the critical parameter of TXRF
spectrometry is the exciting beam radiation density. Modern
X-ray nanophotonics has suitable device called planar X-ray
waveguide-resonator (PXWR) , which can form X-ray nanosize
beams with nanosize width and enhanced radiaiton density.
In comparison with X-ray beams formed by slit-cut devices the
PXWR is able to increase the radiation density in the beam on
3-4 orders. In the result, X-ray waveguide-resonance devices
are used as the exciting beam for TXRF spectrometry allows
to decrease contamination detection limits on 1.5-2 order in
comparison with measurements executed by slit-cut systems
application. Report discusses different TXRF measurement
schemes built onbaseof X-raybeamwaveguide-resonatorswith
different design. It has shown the way for TXRF spectrometry
development on base of these devices. There are presented
TXRF experimental data obtained for the real solid objects and
dry residues of different solutions.
Speaker Biography
Vladimir Egorov was born inMoscow in 1947 year. In 1971, he completed his graduation
in Moscow Engineering and Physical Institute with the specialization of Material
science. In 1981 he defended a doctoral thesis in the specialization of Solid state
physics. Currently, he is working as a senior scientist in laboratory of X-ray crystallo-
optics of Institute of Microelectronics Problems of Russian Academy of is
an expert in ion beam analysis of material, X-ray study of materials and in specific field
of X-ray nanophotonics based on waveguide-resonance propagation phenomenon.
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